LS-LAB-CS
CUSTOMIZABLE LASER PROCESSING MACHINE FOR HIGH ACCURACY APPLICATIONS
LS-LAB-CS is a versatile compact workstation designed for high demanding laser processing applications where multiple laser sources, analysis equipment and high level of customization is needed. Based in precise optical honeycomb breadboard’s structure, LS-LAB-CS provides high flexibility for R&D applications at an affordable cost. User friendly software with CAD GUI environment (codeless programming) ensure efficient and fast process development.
Typical Specifications
| Working Area | Up to 500 x 300 x 150 mm |
| Resolution | 20 nm (XY), 0.1 μm (Z) |
| Repeatability | ± 1 μm (XYZ) |
| Accuracy | ± 2.5 μm (XY); ± 10 μm (Z) |
| Available Laser Sources | From UV to IR. Pulsed or CW |
| Substrate Holder | Custom ceramic or aluminium plate |
| Minimum Laser Spot Size | Down to 1 μm |
| External Dimensions | 1240 x 1750 x 2400 mm (W x D x H) |
| Weight | < 1800 Kg without laser source |
| Control Unit | Workstation with dual 23″ monitor |
Features
Fixed optic head with automatic objective´s change.
Co-lineal vision system with motorized optics.
Co-lineal surface measurement laser system with close-loop correction or 2D scanning option.
Automated camera calibration.
Automated feature camera recognition for precision aligment and rotation compensation.
Based on CAD GUI enviroment (Import DXF, DWG, DWT, ACIS… files).
Class 1 high end enclosure.
Applications
Solar Cell Processing
Wafer scribing and dicing
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